Component-Based Integration of Discrete Event Simulation and Material Flow Analysis for Industrial Environmental Protection: A Case Study in Wafer Production

Abstract

In this paper a new approach is described that integrates discrete event simulation techniques with material flow analysis using a component-based framework based on Microsoft’s COM-Technology. Therefore, we developed a framework architecture that offers basic functions for performing discrete event simulation in combination with material flow analysis. Furthermore, user specific components can easily be plugged in for extension purposes. Basic ideas and concepts as well as available functions of the framework are described. For empirical revision of this approach we created specific semiconductor components and analysed a wafer production process with regard to its environmental and economical aspects.